Cheetah EVO
Micro-focus X-ray and CT system for SMT, semiconductor and laboratory inspection with FeinFocus 160 kV tubes, laminography and automated void analysis.
About the Cheetah EVO
The Cheetah EVO is the larger system in Comet Yxlon's CC series for electronics and semiconductor inspection in production and laboratories. It combines 2D radioscopy, oblique (2.5D) viewing up to ±70°, computed laminography (micro3Dslice) and CT QuickScan/QualityScan.
It uses FeinFocus FXT-160.50 micro-focus or FXT-160.51 multi-focus tubes (20–160 kV). The newer optional water-cooled FXT-160.51 counteracts focal-spot drift during long beam times for repeatable results. Three flat-panel detectors (1308, 1313, 1616; 127 µm pixel pitch, 16 bit) are offered, the large ones with up to 50 % larger field of view.
Workflows run in the FGUI operating software with automated inspection programs, VoidInspect CL/DR void calculation, THTInspect DR fill-level analysis, dose monitoring for sensitive parts and ProLoop connection to inline AOI/AXI. 3D results are visualised with Dragonfly 3D View or analysed with the optional AI-based Dragonfly 3D World.
- Submicron detail resolutionFor 2D, 2.5D and 3D imaging (manufacturer statement).
- micro3Dslice laminographyNon-destructive slice images of flat assemblies as an alternative to micro-sectioning.
- Automated void analysisVoidInspect CL or DR, THTInspect DR.
- Dose monitoringDose Monitoring package with Dose Reduction Kit for X-ray-sensitive electronics.
- Optional high load capacityReinforced table and mechanics for parts up to 20 kg.
- Water-cooled FXT-160.51Optional tube for stable focal spot during long scans.
Technical data
- Max. sample size
- 800 × 500 mm
- Max. radioscopic area
- 460 × 410 mm
- System dimensions (W × D × H)
- 1650 × 1400 × 2050 mm
- System weight
- 2200 kg
- Load capacity
- optional up to 20 kg
- X-ray tube
- FeinFocus FXT-160.50 micro-focus or FXT-160.51 multi-focus, 20–160 kV
- Pixel matrix
- 1004 × 620 px (FPD 1308); 1004 × 1004 px (FPD 1313); 1276 × 1276 px (FPD 1616)
- Pixel pitch
- 127 µm
- Bit depth
- 16 bit
- Oblique viewing
- ±70° (140°)
- 3D modes
- Laminography (micro3Dslice), CT QuickScan, QualityScan
Data from official Comet Yxlon product information (yxlon.comet.tech). Maximum values depend on configuration; voxel size, detail detectability and MPE are different quantities. Final configuration is confirmed in the EMUS quotation.
Options & packages
- Water-cooled FXT-160.51 tube
- Flat-panel detector 1308 / 1313 / 1616
- High load capacity (≤ 20 kg)
- Dose Monitoring package
- ProLoop
- Vista for Cheetah (separate configuration)
- Dragonfly 3D World
Where the Cheetah EVO is used
- PCB, BGA, LGA, BTC, QFN/QFP, THT, IGBT and LED inspection
- Voids in solder joints and bumps
- Wafers, ICs, die attach and 3D IC joints
- TSV, sensors, MEMS/MOEMS
- Batteries, connectors and medical materials
- Military and space electronics
Frequently asked questions
Cheetah EVO or Cougar EVO?
Both share tubes, detectors and software. The Cheetah EVO accepts larger samples (800 × 500 mm) and an optional 20 kg load; the Cougar EVO fits on about one square metre.
Product imagery
Official product videos
How EMUS supports this
Equipment is only part of the answer. Every system we supply is backed by regional engineering, service and application support.
Mechanical, electrical, environmental setup done right the first time.
Qualification and acceptance testing against real criteria.
Operator and application training built around your parts.
Traceable calibration to keep measurements audit-ready.
Preventive and corrective service across the Balkan region.
Method development and problem-solving with our engineers.
Comet Yxlon
TheCheetah EVO is part of the Comet Yxlon portfolio, presented by EMUS for customers in the Balkan region.
Request Technical Consultation
Talk to an EMUS engineer about theCheetah EVO, your parts and tolerances, and the configuration that fits your inspection workflow.