FF35 CT
Laboratory micro-CT with single or dual tube set-up (225 kV micro-focus plus 160 kV or 190 kV nano-focus) for small and medium parts, available as FF35 CT Metrology and FF35 CT SEMI.
About the FF35 CT
The FF35 CT is Comet Yxlon's versatile laboratory CT system for small to medium-sized parts. It can be configured with one or two X-ray tubes: a 225 kV micro-focus directional-beam tube for faster scans of larger or denser parts, combined with a nano-focus tube — either the 190 kV transmission tube or the newer low-maintenance 160 kV nano-focus tube — for submicron detail. Both tubes have their own generator and HV cable, so the system switches between them at the push of a button within one inspection sequence.
Comet Yxlon states 320 W maximum power and a 2D spatial resolution of 4 µm for the 225 kV directional-beam tube, and 600 nm detail visibility for the 160 kV nano-focus tube. These figures apply to the respective tube; maximum power is not available at the smallest focal spot. An optional High Density Power (HDP) target for the 225 kV tube roughly doubles power density, which allows a smaller focal spot at a given power.
Three versions are documented: the standard FF35 CT, the FF35 CT Metrology with a specified MPE_SD = 5.9 µm + L/75 (L in mm) for dimensional measurement, and the FF35 CT SEMI, which Comet Yxlon states is certified to SEMI® S2-0818 and S8-0218 for semiconductor environments. A granite-based manipulator with air conditioning provides stability; maximum sample weight is now up to 50 kg (also available as an upgrade).
Versions & configurations
FF35 CT
Standard laboratory CT, single or dual tube.
FF35 CT Metrology
CT metrology version with MPE_SD = 5.9 µm + L/75 [L in mm].
FF35 CT SEMI
Version for semiconductor-related industries, certified to SEMI® S2-0818 and S8-0218.
- Single or dual tube225 kV micro-focus directional-beam tube plus 160 kV or 190 kV nano-focus tube; switch in seconds.
- 160 kV nano-focus tubeLow-maintenance tube for long scans and continuous operation; 600 nm detail visibility (manufacturer figure).
- High Density Power (HDP) targetOptional for the 225 kV tube; about 2× power density for smaller focal spots at the same power.
- Metrology versionFF35 CT Metrology with MPE_SD = 5.9 µm + L/75 [L in mm].
- SEMI versionFF35 CT SEMI developed for semiconductor applications and certified to SEMI® S2-0818 & S8-0218.
- Granite manipulationGranite base, active air damping, 6 to 8 axes, wide FDD range; air-conditioned cabinet.
- Up to 50 kg samplesIncreased maximum sample weight, also offered as an upgrade.
Technical data
- Max. sample diameter
- 530 mm
- Max. sample height
- 800 mm
- Max. sample weight
- 50 kg
- System dimensions (W × D × H)
- 2960 × 1590 × 2120 mm
- Configuration
- Single or dual tube
- Micro-focus tube
- 225 kV directional-beam tube, 320 W max., water-cooled target; optional HDP target
- Nano-focus tube
- 160 kV nano-focus tube or 190 kV nano-focus transmission tube
- Stated 2D resolution / detail visibility
- 4 µm spatial resolution (225 kV tube, 2D); 600 nm detail visibility (160 kV nano-focus tube)
- CT modes
- Cone-beam CT, QuickScan, QualityScan, HeliExtend, FlexCenter, ZoomScan, LayerScan, ScanExtend (FoV extensions), volume crop
- Manipulation
- Granite base, active air damping, 6 to 8 axes, wide FDD range
- FF35 CT Metrology
- MPE_SD = 5.9 µm + L/75 [L in mm]
- FF35 CT SEMI
- Certified to SEMI® S2-0818 and S8-0218 (manufacturer statement)
Data from official Comet Yxlon product information (yxlon.comet.tech). Maximum values depend on configuration; voxel size, detail detectability and MPE are different quantities. Final configuration is confirmed in the EMUS quotation.
Options & packages
- Second (nano-focus) tube
- HDP target for 225 kV tube
- Metrology version
- SEMI version
- 50 kg sample-weight upgrade
- Vista / Vista X / Vista X Pro software packages
- Battery Insights package
- Dragonfly 3D World
Where the FF35 CT is used
- Electronic components, SMD and semiconductor packages
- Wafer coupons and dies
- MEMS / MOEMS
- Additively manufactured parts and fibre-reinforced plastics
- Battery cells and modules
- Injection-moulded plastics and light-alloy castings
- Medical objects (e.g. cannulas)
- Geological, palaeontological and biological samples
- Failure and structure analysis, assembly checks, process control
- Digitisation and segmentation
Frequently asked questions
Can the FF35 CT be used for dimensional measurement?
Yes, in the FF35 CT Metrology version, for which Comet Yxlon specifies MPE_SD = 5.9 µm + L/75 (L in mm). The standard version is intended for inspection and analysis rather than traceable metrology.
Which tube should I choose?
The 225 kV micro-focus tube covers larger and denser parts and faster scans; a nano-focus tube adds submicron detail for very small parts. Many labs choose the dual-tube set-up. EMUS recommends defining this with sample scans.
Product imagery
Related Comet Yxlon products
How EMUS supports this
Equipment is only part of the answer. Every system we supply is backed by regional engineering, service and application support.
Mechanical, electrical, environmental setup done right the first time.
Qualification and acceptance testing against real criteria.
Operator and application training built around your parts.
Traceable calibration to keep measurements audit-ready.
Preventive and corrective service across the Balkan region.
Method development and problem-solving with our engineers.
Comet Yxlon
TheFF35 CT is part of the Comet Yxlon portfolio, presented by EMUS for customers in the Balkan region.
Request Technical Consultation
Talk to an EMUS engineer about theFF35 CT, your parts and tolerances, and the configuration that fits your inspection workflow.